MEMS micromirror characterization in space environments

MEMS scanning micromirror for optical coherence tomography.

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a sta...

MEMS WDM Routers Using Analog Micromirror Arrays

There have been increasing interests in programmable optical add-drop multiplexers (OADM) and wavelength-selective switches in wavelength-division-multiplexed (WDM) networks. Conventional OADM has one input and one output channels, in addition to an add and a drop channels [l]. It is also called 1x1 OADM. Dynamic OADM with more than one output ports offers greater flexibility and functionality ...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays

Electrostatically Actuated 2-dimensional Mems Micromirror

Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this p...

Design of MEMS Based Elecrostatically Controlled Micromirror Using COMSOL Multiphysics

In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumin...